JPH01152075U - - Google Patents
Info
- Publication number
- JPH01152075U JPH01152075U JP4890288U JP4890288U JPH01152075U JP H01152075 U JPH01152075 U JP H01152075U JP 4890288 U JP4890288 U JP 4890288U JP 4890288 U JP4890288 U JP 4890288U JP H01152075 U JPH01152075 U JP H01152075U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- plasma source
- extraction mechanism
- ion extraction
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4890288U JPH01152075U (en]) | 1988-04-12 | 1988-04-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4890288U JPH01152075U (en]) | 1988-04-12 | 1988-04-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01152075U true JPH01152075U (en]) | 1989-10-19 |
Family
ID=31275029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4890288U Pending JPH01152075U (en]) | 1988-04-12 | 1988-04-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01152075U (en]) |
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1988
- 1988-04-12 JP JP4890288U patent/JPH01152075U/ja active Pending